CPC Class H02M

Disclosed is a display device which includes a voltage generator including a first converter that generates a first voltage using an input voltage and is shut down in response to a shutdown signal and a short circuit protection part including a first short circuit protection part that compares an output voltage of an output terminal of the first converter with a first reference voltage and outputs the shutdown signal. The first converter pre-charges the output voltage to a predetermined voltage level during a first period, maintains a level of the output voltage during a second period subsequent to the first period, and boosts and outputs the output voltage as the first voltage during a third period subsequent to the second period. The first short circuit protection part outputs the shutdown signal when the output voltage in the second period has a level lower than that of the first reference voltage.

A direct drive system for providing RF power to a component of a substrate processing system includes a direct drive circuit including a switch and configured to supply RF power to the component. A switch protection module is configured to monitor a load current and a load voltage in a processing chamber, calculate load resistance based on the load current and the load voltage, compare the load resistance to a first predetermined load resistance, and adjust at least one of an RF power limit and an RF current limit of the direct drive circuit based on the comparison.

A semiconductor device includes: a wiring layer; a titanium nitride layer deposited on the wiring layer; a titanium oxynitride layer deposited on the titanium nitride layer; a titanium oxide layer deposited on the titanium oxynitride layer; and a surface passivation film deposited on the titanium oxide layer, wherein an opening penetrating the titanium nitride layer, the titanium oxynitride layer, the titanium oxide layer, and the surface passivation film is provided to expose a part of the wiring layer so as to serve as a pad.

The present disclosure provides a high voltage device built from modular low voltage cells. Each low voltage cell includes a plurality of low voltage semiconductor devices and one or more low voltage passive components. Each cell can be a current-bidirectional two-quadrant switch or a four-quadrant switch. All the cells may be identical and controlled with a delay time in between. Therefore, the total on and off time of the high voltage device can be controlled to reduce the output equivalent dv/dt. The cell's voltage balancing can be achieved through a control algorithm disclosed herein.