Legal claims defining the scope of protection. Each claim is shown in both the original legal language and a plain English translation.
1. A method of fabricating an optical element, comprising: providing a substrate having a first refractive index and transparent in the visible spectrum; forming on the substrate periodically repeating polymer structures; and exposing the substrate to a metal precursor followed by an oxidizing precursor, wherein exposing is performed under a gas pressure and at a temperature such that an inorganic material comprising the metal of the metal precursor is infiltrated into the periodically repeating polymer structures, thereby forming a pattern of periodically repeating optical structures configured to diffract visible light, the optical structures having a second refractive index greater than the first refractive index.
2. An optical element, comprising: a substrate having a first refractive index and transparent in the visible spectrum; and a pattern of periodically repeating optical structures formed on the substrate and configured to diffract visible light, the optical structures having a second refractive index greater than the first refractive index and comprising a polymeric material having infiltrated therein an inorganic material comprising an oxidized metal.
3. The optical element of claim 2 , wherein the polymeric material has a bulk refractive index less than the second refractive index and the inorganic material has a bulk refractive index higher than the second refractive index.
4. The optical element of claim 2 , wherein the second refractive index is greater than 1.7 and is greater than the first refractive index by at least 0.2.
This invention relates to optical elements designed to manipulate light, particularly those with varying refractive indices to enhance optical performance. The optical element includes a first region with a first refractive index and a second region with a second refractive index. The second refractive index is significantly higher than the first, specifically greater than 1.7 and at least 0.2 units higher than the first refractive index. This design improves light refraction, transmission, or focusing properties, which is critical for applications in lenses, waveguides, or other optical systems where precise control of light behavior is required. The high refractive index difference ensures efficient light bending or confinement, reducing aberrations and improving overall optical efficiency. Such elements are useful in high-performance optical devices, including cameras, microscopes, and fiber optics, where traditional materials may not provide sufficient refractive contrast. The invention addresses the need for advanced optical materials that enable better light manipulation in compact or high-precision systems.
5. The optical element of claim 2 , wherein the substrate has a refractive index greater than 1.5.
6. The optical element of claim 2 , wherein the polymeric material comprises a photoresist.
The optical element is designed for use in optical systems, particularly in applications requiring precise light manipulation. The element addresses challenges in achieving high-resolution patterning and efficient light modulation in photonic devices. It features a polymeric material that is specifically formulated to interact with light in a controlled manner, enabling applications such as waveguides, lenses, or diffraction gratings. The polymeric material in the optical element is a photoresist, a light-sensitive polymer that undergoes chemical changes when exposed to light. This property allows the material to be patterned with high precision, making it suitable for fabricating micro- and nanostructures in optical components. The photoresist can be selectively exposed and developed to create intricate designs, which are essential for applications like photolithography, optical sensors, or integrated photonics. The optical element leverages the photoresist's sensitivity to light to achieve desired optical properties, such as refractive index modulation or light absorption. This enables the element to function as a dynamic or static optical component, depending on the application. The use of a photoresist also allows for compatibility with standard semiconductor fabrication techniques, facilitating scalable production of optical devices. The element's design ensures efficient light transmission, minimal scattering, and precise control over optical pathways, making it suitable for advanced photonic systems.
7. The optical element of claim 2 , wherein the inorganic material comprises a metal oxide.
The invention relates to optical elements designed to manipulate light, particularly for applications in displays, sensors, or optical communication systems. A key challenge in such systems is achieving precise control over light transmission, reflection, or refraction while maintaining durability and performance under varying environmental conditions. The invention addresses this by incorporating an inorganic material into the optical element, which enhances stability and optical properties. Specifically, the inorganic material is a metal oxide, such as titanium dioxide, silicon dioxide, or aluminum oxide. These materials are chosen for their high refractive indices, chemical stability, and resistance to degradation, ensuring reliable optical performance. The metal oxide can be integrated into the optical element as a coating, a bulk material, or a composite structure, depending on the application. This design improves the element's ability to modulate light efficiently while resisting environmental factors like moisture, temperature fluctuations, or mechanical stress. The use of metal oxides also allows for fine-tuning of optical properties, such as refractive index or transparency, to meet specific system requirements. This innovation is particularly useful in high-performance optical devices where durability and optical precision are critical.
8. The optical element of claim 7 , wherein the inorganic material comprises a transition metal oxide.
The invention relates to optical elements designed for use in optical systems, particularly those requiring high durability and resistance to environmental factors. A key problem addressed is the degradation of optical performance in harsh conditions, such as exposure to moisture, temperature fluctuations, or mechanical stress, which can compromise the functionality of optical components. The invention provides an optical element with an inorganic material layer that enhances stability and performance. This inorganic material layer is applied to a substrate, such as glass or plastic, and is engineered to maintain optical properties under challenging conditions. The inorganic material includes a transition metal oxide, which is known for its chemical stability, hardness, and resistance to environmental degradation. Transition metal oxides, such as titanium dioxide, zinc oxide, or tungsten oxide, offer excellent refractive index control and durability, making them suitable for coatings in lenses, mirrors, or waveguides. The optical element may also incorporate additional layers, such as adhesion promoters or anti-reflective coatings, to further enhance performance. The use of transition metal oxides ensures long-term reliability in applications like automotive optics, aerospace systems, or industrial sensors, where environmental resilience is critical. The invention thus provides a robust solution for optical elements that must operate reliably in demanding environments.
9. The optical element of claim 7 , wherein the metal oxide comprises an oxide selected from the group consisting of aluminum oxide, zinc oxide, zirconium oxide, hafnium oxide or titanium oxide.
10. The optical element of claim 7 , wherein the inorganic material is incorporated into surface regions of the optical structures and core regions of the optical structures do not have the inorganic material incorporated therein.
11. The optical element of claim 2 , wherein adjacent ones of the periodically repeating optical structures are separated by a space, wherein a surface of the substrate in the space does not have the inorganic material disposed thereon.
12. The optical element of claim 2 , wherein adjacent ones of the periodically repeating optical structures are separated by a space, wherein a surface of the substrate in the space has formed thereon a layer of a polymeric material having incorporated therein the inorganic material, the layer having a thickness smaller than heights of the optical structures.
13. The optical element of claim 12 , wherein the layer of polymeric material formed in the space has an entire thickness incorporated with the inorganic material.
14. The optical element of claim 12 , wherein the layer of polymeric material formed in the space has a partial thickness incorporated with the inorganic material at a surface region and a partial thickness not incorporated with the inorganic material.
15. The optical element of claim 2 , wherein the substrate is configured such that visible light diffracted by periodically repeating optical structures propagate under total internal reflection.
16. The optical element of claim 2 , wherein the periodically repeating optical structures comprise a metasurface.
17. The optical element of claim 2 , wherein the substrate is configured such that visible light is guided therein under total internal reflection and is diffracted out of the substrate by periodically repeating optical structures.
18. The optical element of claim 2 , wherein the substrate is configured such that visible light is guided therein under total internal reflection and is diffracted by periodically repeating optical structures so as to alter the direction of light beam propagating within the substrate by total internal reflection.
19. An optical system, comprising: an optical element, comprising: a substrate having a first refractive index and transparent in the visible spectrum, and a pattern of periodically repeating optical structures formed on the substrate and configured to diffract visible light, the optical structures having a second refractive index greater than the first refractive index and comprising a polymeric material having infiltrated therein an inorganic material comprising an oxidized metal, wherein the periodically repeating optical structures comprise nanobeams arranged as a metasurface, the metasurface comprising a plurality of repeating unit cells, each unit cell comprising: a first set of nanobeams formed by one or more first nanobeams; and a second set of nanobeams formed by one or more second nanobeams disposed adjacent to the one or more first nanobeams and separated from each other by a sub-wavelength spacing, wherein the one or more first nanobeams and the one or more second nanobeams are elongated in different orientation directions.
20. The optical system of claim 19 , wherein the unit cells repeat at a period less than or equal to about 10 nm to 1 μm.
This invention relates to an optical system designed to manipulate light at the nanoscale, addressing challenges in high-resolution imaging, sensing, and photonic device fabrication. The system includes an array of unit cells, each containing at least one subwavelength structure configured to interact with electromagnetic radiation. These structures are engineered to modify the amplitude, phase, or polarization of light, enabling precise control over wavefront shaping, beam steering, or spectral filtering. The unit cells are arranged in a periodic pattern, with the spacing between them being less than or equal to about 10 nm to 1 μm. This tight periodicity allows the system to operate at wavelengths comparable to or smaller than the spacing between unit cells, enabling subwavelength resolution and enhanced optical performance. The system can be integrated into devices such as metasurfaces, photonic circuits, or imaging systems, where compact, high-efficiency light manipulation is required. The invention improves upon conventional optical components by providing greater design flexibility and functionality at the nanoscale, addressing limitations in diffraction-limited performance and enabling advanced applications in optics and photonics.
21. The optical system of claim 19 , wherein the one or more first nanobeams and the one or more second nanobeams are oriented at an angle relative to each other to cause a phase difference between the visible light diffracted by the one or more first nanobeams and the visible light diffracted by the second nanobeams.
22. The optical system of claim 19 , wherein the one or more first nanobeams and the one or more second nanobeams are oriented in orientation directions that are rotated by about 90 degrees relative to each other.
23. The optical system of claim 19 , wherein the unit cells repeat at a period less than or equal to a wavelength of the visible light, wherein the wavelength is within the visible spectrum.
This invention relates to an optical system designed to manipulate visible light through a periodic structure. The system includes an array of unit cells arranged in a repeating pattern, where the spacing between these unit cells is equal to or smaller than the wavelength of visible light. The visible light wavelength range spans approximately 380 to 750 nanometers. By controlling the periodicity of the unit cells at sub-wavelength scales, the system can achieve precise control over light propagation, enabling applications such as beam steering, filtering, or wavefront shaping. The unit cells may incorporate sub-wavelength features like gratings, metasurfaces, or photonic crystals to interact with light at the nanoscale. The system can be used in optical devices requiring high-resolution light manipulation, such as displays, sensors, or communication systems. The sub-wavelength periodicity ensures efficient diffraction and interference effects, allowing for compact and high-performance optical components. The invention addresses challenges in traditional optics by enabling precise light control at scales smaller than the wavelength, overcoming limitations in conventional lens-based systems.
24. The optical system of claim 19 , wherein the one or more first nanobeams and the second nanobeams have a height smaller than a wavelength of the visible light.
The invention relates to an optical system designed for manipulating visible light at the nanoscale. The system addresses the challenge of controlling light at dimensions smaller than its wavelength, which is critical for applications in nanophotonics, integrated optics, and high-resolution imaging. The system includes an array of nanobeams, where the first set of nanobeams and a second set of nanobeams are structured to interact with visible light. A key feature is that the height of these nanobeams is smaller than the wavelength of visible light, enabling subwavelength confinement and precise light manipulation. The nanobeams are arranged to form a periodic or aperiodic structure, allowing for tailored optical properties such as resonance, diffraction, or waveguiding. The system may also include a substrate supporting the nanobeams and additional layers or materials to enhance optical functionality. The nanobeams can be fabricated using techniques like electron-beam lithography or nanoimprinting, ensuring precise control over their dimensions. This design enables compact, high-performance optical devices for applications in sensors, displays, and photonic circuits.
25. An optical system comprising a waveguide configured to propagate visible light, the optical system comprising: a substrate having a first refractive index and transparent in the visible spectrum such that light can be guided therein by total internal reflection; and a pattern of periodically repeating optical structures formed on the substrate and configured to diffract visible light, the optical structures having a second refractive index greater than the first refractive index and comprising a polymeric material having infiltrated therein an inorganic material comprising an oxidized metal, wherein the periodically repeating optical structures are arranged to diffract light at a diffraction angle relative to a direction of an incident light and to cause the diffracted light to propagate in the substrate under total internal reflection or are arranged to diffract light guided within the substrate under total internal reflection at a diffraction angle relative to a direction of light guided within the substrate.
26. The optical system of claim 25 , wherein the polymeric material has a bulk refractive index less than the second refractive index and the inorganic material has a bulk refractive index higher than the second refractive index.
27. The optical system of claim 25 , wherein the second refractive index is greater than 1.7 and is greater than the first refractive index by at least 0.2.
28. The optical system of claim 25 , wherein the diffraction angle exceeds 50 degrees.
The optical system is designed for high-angle diffraction, addressing limitations in conventional optical systems that struggle with large diffraction angles, which are critical for applications like beam steering, spectroscopy, and imaging. The system includes a diffraction grating or similar structure that achieves a diffraction angle exceeding 50 degrees, enabling precise control of light direction and enhanced resolution. This high-angle capability is particularly useful in compact optical devices where space constraints require steep angular deviations. The system may incorporate additional optical elements, such as lenses or mirrors, to further refine the diffracted light path. The diffraction grating is optimized for efficiency and minimal loss, ensuring high-performance operation across a broad range of wavelengths. This design overcomes the challenges of low diffraction angles in traditional systems, providing a more versatile and effective solution for advanced optical applications.
29. The optical system of claim 25 , further comprising a light source configured to emit light of the wavelength to the pattern of periodically repeating optical structures.
The optical system is designed for manipulating light using periodically repeating optical structures, such as diffraction gratings or photonic crystals. These structures interact with light to modify its properties, such as direction, phase, or intensity, enabling applications in imaging, sensing, or optical communication. A key challenge in such systems is ensuring efficient and precise control of light propagation through these structures. The system includes a light source that emits light at a specific wavelength, which is directed toward the pattern of periodically repeating optical structures. The light source is configured to provide the necessary wavelength for optimal interaction with the structures, ensuring effective modulation of the light. This configuration allows the system to achieve desired optical effects, such as beam steering, filtering, or wavefront shaping, depending on the design of the structures. The integration of the light source with the optical structures ensures a compact and efficient system for light manipulation.
30. The optical system of claim 25 , further comprising a spatial light modulator configured to modulate light from the light source and to output the modulated light to the pattern of periodically repeating optical structures.
31. The optical system of claim 25 , wherein the periodically repeating optical structures are arranged to diffract light at a diffraction angle relative to the direction of the incident light and to cause the diffracted light to propagate in the substrate under total internal reflection.
32. The optical system of claim 25 , wherein the periodically repeating optical structures are arranged to diffract light guided within the substrate under total internal reflection at a diffraction angle relative to the direction of light guided within the substrate.
33. The optical system of claim 32 , wherein the periodically repeating optical structures are arranged to diffract light guided within the substrate under total internal reflection out of the substrate.
34. A head-mounted display device configured to project light to an eye of a user to display augmented reality image content, the head-mounted display device comprising: a frame configured to be supported on a head of the user; a display disposed on the frame, at least a portion of the display comprising: one or more waveguides, the one or more waveguides comprising a transparent portion and disposed at a location in front of the user's eye when the user wears the head-mounted display device such that the transparent portion transmits light from a portion of an environment in front of the user to the user's eye to provide a view of the portion of the environment in front of the user; one or more light sources; and at least one diffraction grating configured to couple light from the light sources into the one or more waveguides or to couple light out of the one or more waveguides, the diffraction grating comprising: a substrate having a first refractive index and transparent in the visible spectrum; and a pattern of periodically repeating optical structures formed on the substrate and configured to diffract visible light, the optical structures having a second refractive index greater than the first refractive index and comprising a polymeric material having infiltrated therein an inorganic material comprising an oxidized metal.
35. The device of claim 34 , wherein the one or more light sources comprises a fiber scanning projector.
36. The device of claim 34 , the display configured to project light into the user's eye so as to present image content to the user on a plurality of depth planes.
This invention relates to a wearable display device designed to present image content to a user at multiple depth planes, enhancing visual realism and depth perception. The device includes a display system that projects light directly into the user's eye, creating a multi-focal display that simulates objects at different distances. This addresses the limitation of traditional displays, which typically present content on a single plane, reducing the sense of depth and immersion. The display system is configured to modulate light in a way that forms distinct focal planes, allowing the user to perceive content as if it were physically present at varying depths. This technology is particularly useful in augmented reality (AR) and virtual reality (VR) applications, where accurate depth representation is critical for user experience. The device may also incorporate additional components, such as sensors or tracking systems, to dynamically adjust the projected content based on the user's eye movements or environmental conditions. By providing a more lifelike visual experience, the invention improves user interaction with digital content in immersive environments.
37. A method of fabricating an optical element, comprising: providing a substrate transparent in the visible spectrum; forming on the substrate periodically repeating polymer structures having a refractive index; and exposing the substrate to a metal precursor followed by an oxidizing precursor, wherein exposing is performed under a gas pressure and at a temperature such that an inorganic material comprising the metal of the metal precursor is infiltrated into the periodically repeating polymer structures, thereby increasing the refractive index of the periodically repeating polymer structures to form a pattern of periodically repeating optical structures configured to diffract visible light.
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February 9, 2021
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