A sputtering apparatus includes a support assembly and posts. The support assembly includes an upper base, a lower base, seat members, and connection posts interconnected between the upper base and the lower base. The upper base defines cutouts. The seat members are rotatably mounted on the lower base and aligned with the cutouts. Each seat member includes a hollow receiving post, a support post moveably received in the receiving post, a lever bar is pivoted to the receiving post, and a drive post, the drive post and the support post are coupled to opposite ends of the lever bar. Each seat member is rotatable about a longitudinal axis of the receiving post. The posts fix workpieces. Each post includes a rod body portion having a first end and an opposite second end, an engagement portion at the first end, and a protrusion extending from the second end.
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1. A sputtering apparatus, comprising: a support assembly comprising an upper base, a lower base, a plurality of seat members, and at least two connection posts interconnected between the upper base and the lower base, the upper base defining a plurality of cutouts, the seat members rotatably mounted on the lower base and aligned with the cutouts, each seat member comprising a hollow receiving post defining a slot in a sidewall thereof, a support post moveably and rotatably received in the receiving post, a lever bar pivotally connected to the sidewall in the slot by a pivot and being rotatable about the pivot, and a drive post moveably received in the slot, the drive post and the support post coupled to opposite ends of the lever bar and being movable along a longitudinal axis of the receiving post with the rotation of the lever bar, each seat member being rotatable about the longitudinal axis; and a plurality of posts configured for fixing workpieces thereon, each post comprising a rod body portion having a first end and an opposite second end, an engagement portion at the first end having a greater size than that of the rod body portion, and a protrusion extending from the second end, the engagement portion engaging in the cutouts, the second end received in the receiving post and resting on the support post, and each drive post configured for abutting against the protrusion of the corresponding post thus driving the post to revolve when the receiving post rotates.
The sputtering apparatus uses a rotating support assembly to hold and move workpieces during the sputtering process. The assembly consists of an upper and lower base connected by posts. Rotating seat members are mounted on the lower base, each having a hollow receiving post with a slot. A support post inside the receiving post holds a workpiece. A lever, pivoted to the receiving post, moves the support post up and down. A drive post, also in the slot and connected to the lever's opposite end, pushes against the workpiece. The workpiece is fixed to the top of a detachable post with an enlarged head that fits into cutouts on the upper base. As the seat member rotates, the drive post pushes the workpiece post, causing it to revolve.
2. The sputtering apparatus as claimed in claim 1 , wherein the support assembly is rotatable about a central axis thereof, the upper base is an annular planar plate and defines an upper through hole at a center thereof, and the cutouts are defined in a peripheral edge of the upper base with each cutout opening toward a direction away from the central axis.
The sputtering apparatus from the previous description has a support assembly that rotates around a central axis. The upper base is a flat ring with a hole in the center. Cutouts are located on the outer edge of the upper base, facing away from the central axis. This rotating support assembly moves the workpieces past the sputtering target for uniform coating.
3. The sputtering apparatus as claimed in claim 2 , wherein the upper base comprises a first surface and a second surface facing the lower base, the first surface is opposite to the second surface, each cutout tapers in the direction away from the central axis, and a horizontal width of each cutout as measured along a radial direction of the upper base decreases along a direction from the upper base to the lower base.
In the sputtering apparatus described previously, the upper base (the flat ring with cutouts) has a top and bottom surface. Each cutout narrows as it extends away from the center of the ring, decreasing in width from the top surface of the upper base to the bottom surface. This tapered shape helps secure the detachable posts holding the workpieces within the cutouts of the upper base.
4. The sputtering apparatus as claimed in claim 3 , wherein the lower base is an annular planar plate and comprises a third surface opposite to the second surface, a plurality of first receiving holes are defined in the third surface aligned with the respective cutouts, the seat members are rotatably received in the corresponding first receiving holes, and the cutouts and the seat members are configured for engaging with the respective posts.
The sputtering apparatus described previously uses a lower base that is also a flat ring, with a top and bottom surface. The bottom surface has receiving holes aligned with the cutouts in the upper base. The rotating seat members are placed in these holes. The cutouts on the upper base, along with the seat members, are designed to hold the detachable posts carrying the workpieces.
5. The sputtering apparatus as claimed in claim 1 , wherein a second receiving hole is defined in the receiving post and communicates with the slot, and the drive post is configured to move upward to be exposed at the receiving post and abut against the post when the post rests on the support post or move downward to be totally received in slot when the post leaves the support post.
In the sputtering apparatus described previously, the receiving post has a second hole that connects to its slot. The drive post can move up to stick out of the receiving post and push against the detachable post, or it can move down to be completely inside the slot when the detachable post is removed from the support post. This allows the drive post to only engage the workpiece post when it is in the correct position.
6. The sputtering apparatus as claimed in claim 1 , wherein the lever bar comprises a first connection end and a second connection end, the first connection end and the second connection end are positioned at opposite sides of the pivot, the first connection end is pivotally connected to the support post, and the second connection end is pivotally connected to the drive post.
In the sputtering apparatus described previously, the lever bar has two ends connected to the support and drive posts, positioned on either side of the pivot point. One end of the lever arm is connected to the support post which holds the workpiece, and the other end is connected to the drive post which pushes against the bottom of the detachable workpiece post. The rotation of the lever bar raises and lowers the workpiece.
7. The sputtering apparatus as claimed in claim 6 , wherein the support post comprises an upper end and a lower end opposite to the upper end, the upper end supports the second end of the post, the lower end defines a first engagement hole, the drive post comprises an upper portion and a lower portion, the upper portion is configured for abutting against the protrusion, the lower portion defines a second engagement hole, the first connection end is pivotally connected to the lower end in the first engagement hole, and the second connection end is pivotally connected to the lower portion in the second engagement hole.
In the sputtering apparatus described previously, the support post has an upper end supporting the detachable post and a lower end with a hole. The drive post has an upper part that touches the detachable post and a lower part with another hole. One end of the lever connects to the hole in the support post, and the other end connects to the hole in the drive post. This lever system converts rotational motion to vertical motion, allowing the drive post to push the detachable post holding the workpiece.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
October 17, 2010
August 13, 2013
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