A flow splitter (10) that is uniquely characterized by the use of two diaphragm valves in a single valve body that are arranged in opposition to one another. The diaphragm valves are coupled together for common movement by a coupler, such that the flow rate through respective outlets is a function of the position of either diaphragm valve. That is, the position of one valve is a function of the position of the other valve, and vice versa. With this construction a single actuator can control the ratio of total flow that will be delivered to each of two outlet ports. Moreover, such construction eliminates the need for thermal or pressure sensors and thus the drawbacks associated therewith.
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1. A flow sputter comprising a valve body having an inlet, first and second outlets, and a common passage connected to the inlet and extending between oppositely facing first and second valve seats disposed between the common passage and the first and second outlets, first and second diaphragm valves respectively movable toward and away from the first and second valve seats for modulating flow between the common passage and the first and second outlets, and a coupler coupling the first and second diaphragm valves for common movement, wherein the diaphragm valves each include a diaphragm having a peripheral portion attached to the valve body and a central portion attached to the coupler, and wherein the central portion of the diaphragm of one of the diaphragm valves is attached to the coupler by a magnetic device.
A flow splitter controls fluid flow to two outlets. A valve body contains an inlet that feeds a common passage. Two valve seats within the passage lead to the first and second outlets. Diaphragm valves, positioned opposite each other, move towards and away from these seats to regulate flow to each outlet. The diaphragms are coupled together by a coupler for synchronized movement, meaning one valve's position affects the other. Each diaphragm has a peripheral section attached to the valve body and a central section attached to the coupler. One diaphragm's central part connects to the coupler using a magnetic device.
2. A flow splitter according to claim 1 , wherein the central portion of the diaphragm of one of the diaphragm valves is welded to the coupler.
The flow splitter, described in the previous flow splitter description, has one diaphragm valve with its central portion welded to the coupler. So, instead of a magnetic device connecting the diaphragm to the coupler, a weld provides a fixed connection between the central diaphragm part and the coupler, which enables synchronized movement of both diaphragms to control flow to each outlet.
3. A flow splitter according to claim 1 , wherein the diaphragm valves each include a valve member attached to or unitary with the central portion thereof, the valve member being movable toward and away from the respective valve seat to control flow therethrough.
The flow splitter, described in the previous flow splitter description, incorporates a valve member on each diaphragm valve. This valve member is either directly attached to, or is a single piece with, the central portion of the diaphragm. The valve member moves with the diaphragm towards and away from the valve seat, directly controlling the flow through that seat to the respective outlet.
4. A flow splitter according to claim 3 , wherein the valve members of the diaphragm valves are connected by a stem extending therebetween.
The flow splitter, described in the previous flow splitter description, incorporates a stem that connects the valve members of the two diaphragm valves. This stem physically links the two valve members, ensuring they move together and providing a direct mechanical connection for coordinated flow control to the first and second outlets.
5. A flow splitter according to claim 1 , wherein each valve member includes a gain-increasing tapered portion extending through the valve seat.
The flow splitter, described in the previous flow splitter description, utilizes a valve member with a tapered portion that extends through the valve seat. This tapered design increases the flow gain; small movements of the valve member result in larger changes in flow rate, providing more sensitive and precise flow control as the valve opens.
6. A flow splitter according to claim 1 , wherein at least one of the diaphragm valves is attached to the coupler with a snap connection.
The flow splitter, described in the previous flow splitter description, features at least one diaphragm valve that connects to the coupler using a snap connection. This allows for easy assembly and disassembly of the valve, simplifying maintenance and potentially allowing for modular replacement of valve components.
7. A flow splitter according to claim 1 , comprising an actuator for moving the first and second diaphragm valves.
The flow splitter, described in the previous flow splitter description, includes an actuator. This actuator provides the force to move the two diaphragm valves in a synchronized manner via the coupler, controlling the flow ratio to each outlet.
8. A flow splitter according to claim 7 , comprising a controller for controlling the actuator.
The flow splitter, described in the previous flow splitter description that also contains an actuator, includes a controller for managing the actuator. This controller can automatically adjust the actuator's position to achieve a desired flow ratio, potentially based on external signals or a pre-programmed flow profile, automating the flow splitting process.
9. A flow splitter according to claim 1 , wherein the flow ratio is measured as a function of the position of either one of the diaphragm valves.
The flow splitter, described in the previous flow splitter description, measures the flow ratio based on the position of one of the diaphragm valves. By monitoring the position of either diaphragm valve, the system can infer the relative flow rates through each outlet without needing separate flow sensors.
10. A flow splitter according to claim 1 , wherein no sliding seals are associated with the diaphragm valves and/or the coupler coupling the diaphragm valves.
The flow splitter, described in the previous flow splitter description, is designed without any sliding seals on either the diaphragm valves or the coupler. This reduces friction, improves reliability, and minimizes the risk of leaks, contributing to a more robust and maintenance-free flow control system.
11. A flow splitter according to claim 1 , wherein the coupler is not sealed to the valve body.
The flow splitter, described in the previous flow splitter description, has a coupler that is not sealed to the valve body. This means the coupler can move freely without creating a pressure-tight barrier, simplifying the design and potentially reducing manufacturing costs while allowing for synchronized diaphragm movement.
12. A flow sputter according to claim 1 , wherein the diaphragm of each diaphragm valve is made of metal.
The flow splitter, described in the previous flow splitter description, uses metal for the diaphragms of both diaphragm valves. Metal diaphragms provide durability, chemical resistance, and the ability to withstand higher pressures and temperatures compared to diaphragms made of other materials.
13. A flow splitter according to claim 1 , wherein the flow splitter is used in a semiconductor processing system to supply flow of processing fluids to processing chambers.
The flow splitter, described in the previous flow splitter description, is used within a semiconductor processing system to control the flow of processing fluids to different processing chambers. This precise flow control is crucial for many semiconductor manufacturing processes, such as etching, deposition, and cleaning, where accurate fluid delivery is essential for consistent results.
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April 28, 2008
September 10, 2013
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