The example of present invention provides an array substrate, the method for manufacturing the same, and a liquid crystal display device, wherein the array substrate comprises: a gate electrode, a gate insulating layer, a barrier layer pattern and an active semiconductor layer pattern formed by metal oxide semiconductor which are located on the gate insulating layer, a semiconductor protecting layer which covers the barrier layer pattern and the active semiconductor layer pattern, and has via holes at positions corresponding to the barrier layer pattern and the active semiconductor layer pattern; a data wire, a source electrode and a drain electrode formed by metal Cu, which are located at via holes. Metal Cu is used to form the data wire, the source electrode and the drain electrode, and the metal oxide semiconductor is used as the barrier layer for the metal Cu, and as a result, the diffusion of metal Cu into the layers such as the gate insulating layer etc., is prevented in the manufacturing process of TFT.
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December 13, 2013
April 25, 2017
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