A fluid manifold comprised of a manifold adapted to deliver fluid directly into a gap formed between a surface of a substrate and an acoustic transducer. The fluid is delivered into the gap at a variable rate along a length of the manifold. Preferably, the manifold includes a plurality of apertures positioned along the length of the manifold for dispensing the fluid into the gap at the variable rate.
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1. An apparatus comprising: an acoustic transducer configured to deliver acoustic energy to a surface of a circular substrate; a manifold positioned adjacent to an edge of the acoustic transducer; an angled face extending along a length of the manifold and facing in the direction of the acoustic transducer, with the angled face being oriented to deliver a fluid directly into a gap formed between the surface of the circular substrate and the acoustic transducer, and with the length of the manifold extending parallel to a radius of the circular substrate; and at least a first aperture and a second aperture positioned along the length of the manifold for dispensing the fluid into the gap, with the first aperture dispensing the fluid at a different rate than the second aperture, whereby a variable amount of the fluid is delivered into the gap along the length of the manifold.
An apparatus for cleaning circular substrates uses an acoustic transducer to deliver energy to the substrate's surface. A manifold, positioned near the transducer's edge, has an angled face that directs fluid into the gap between the substrate and transducer. The manifold runs parallel to the substrate's radius. It includes at least two apertures that dispense fluid at different rates, creating a variable fluid flow along the manifold's length and across the gap. This variable fluid flow ensures uniform cleaning of the substrate.
2. The apparatus of claim 1 wherein the acoustic transducer has a wedge shape.
The apparatus from the previous cleaning description is modified such that the acoustic transducer is wedge-shaped. This shape helps to focus the acoustic energy onto a specific area of the circular substrate to be cleaned.
3. The apparatus of claim 1 wherein the manifold includes a plurality of apertures for dispensing the fluid into the gap.
The apparatus from the first cleaning description includes a manifold that dispenses fluid into the gap using multiple apertures. This allows for a more controlled and customizable fluid distribution pattern compared to just one or two apertures. This ensures the efficient and uniform cleaning of the substrate's surface using the acoustic transducer.
4. The apparatus of claim 3 wherein the plurality of apertures comprises at least a first circular aperture that is circular in shape and has a first diameter and a second circular aperture that is circular in shape and has a second diameter, with the first diameter being different in size than the second diameter.
The apparatus from the cleaning description with multiple apertures is further refined. The multiple apertures include at least a first circular aperture of one diameter, and a second circular aperture of a different diameter. This difference in diameter directly controls the flow rate of fluid dispensed by each aperture, allowing for precise control over the fluid distribution along the manifold to the gap.
5. The apparatus of claim 3 wherein the plurality of apertures comprises at least a first aperture, a second aperture and a third aperture, with the first aperture and the second aperture being adjacent to each other and separated by a first distance and the second aperture and the third aperture being adjacent to each other and separated by a second distance, with the first distance being different than the second distance.
In the multiple aperture cleaning device, the apparatus from the cleaning description with multiple apertures has at least three apertures (first, second, and third). The first and second apertures are close together, separated by a distance X. The second and third apertures are also close together, but separated by a distance Y. Distance X and distance Y are different, creating non-uniform spacing. This varying space between the apertures further refines control over the fluid distribution, enabling precise cleaning for specific substrate geometries or contamination patterns.
6. An apparatus comprising: an acoustic transducer configured to deliver acoustic energy to a surface of a circular substrate, the acoustic transducer having a wedge shape with a first end and a second end, with the second end being wider than the first end; a manifold positioned along an edge of the acoustic transducer with the manifold having an angled face that extends along a length of the manifold and faces in the direction of the acoustic transducer, and with the length of the manifold extending parallel to a radius of the circular substrate; and a plurality of apertures positioned in the angled face for dispensing a fluid directly into a gap formed between the surface of the circular substrate and the acoustic transducer, the plurality of apertures including at least a first aperture and a second aperture positioned along the length of the manifold for dispensing the fluid into the gap, with the first aperture dispensing the fluid at a different rate than the second aperture, whereby a variable amount of the fluid is delivered into the gap along the length of the manifold to clean the surface of the substrate.
An apparatus for cleaning circular substrates features a wedge-shaped acoustic transducer (wider at one end than the other) for delivering energy to the substrate. A manifold positioned along the transducer's edge has an angled face parallel to the substrate's radius. Multiple apertures in this face dispense fluid directly into the gap between the substrate and the transducer, with at least two apertures dispensing fluid at different rates. This variable fluid delivery ensures effective surface cleaning along the manifold's length. The angled face dispenses fluid for the purpose of cleaning the surface of the substrate.
7. The apparatus of claim 6 wherein the first aperture is circular in shape and has a first diameter, and the second aperture is circular in shape and has a second diameter, with the first diameter being different in size than the second diameter.
The apparatus from the wedge-shaped transducer cleaning description has a first circular aperture with diameter X and a second circular aperture with diameter Y, where X and Y are different. The differing diameters ensure variable fluid flow rates from each aperture, contributing to non-uniform fluid delivery for optimal cleaning in the space between the transducer and the substrate.
8. The apparatus of claim 6 further comprising a third aperture, with the first aperture and the second aperture being adjacent to each other and separated by a first distance and the second aperture and the third aperture being adjacent to each other and separated by a second distance, with the first distance being different than the second distance.
Further improving the wedge-shaped transducer cleaning system, the apparatus includes three apertures: a first, a second, and a third. The first and second apertures are separated by distance X, while the second and third are separated by distance Y, where X and Y are different. This non-uniform spacing enhances control over the fluid distribution pattern for precise surface cleaning of the substrate relative to the wedge shaped transducer.
9. The apparatus of claim 6 wherein the gap is formed between a resonator on the acoustic transducer and the surface.
In the wedge-shaped transducer cleaning system, the gap formed between the substrate and the transducer is explicitly defined as being located between a resonator on the acoustic transducer and the substrate's surface. The resonator is the part of the transducer that vibrates and generates the acoustic energy, and the cleaning fluid is delivered directly into the narrow gap adjacent to it.
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June 28, 2012
October 24, 2017
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