Patentable/Patents/US-9852976
US-9852976

Semiconductor package and fabricating method thereof

PublishedDecember 26, 2017
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Explain Like I'm 5
2 min read

Imagine your toy car. It has a tiny engine, right? But what if you wanted to put a super-duper engine in it that makes it go really, really fast, AND you want the car to be even smaller? That's a tricky problem!

Our brainy scientists and engineers came up with a super clever idea, like a secret blueprint, called the "Semiconductor Package and Fabricating Method Thereof" patent. 🤯

Think of the 'semiconductor package' as the special box where the tiny engine (which is actually a microchip, the brain of your phone or computer) lives. Inside this box, there are super-duper tiny roads (called 'redistribution structures') that help the engine parts talk to each other really fast.

Before this invention, these roads were a bit thick and sometimes bumpy, making the box a bit chunky. But this new secret blueprint shows how to build these roads super-thin and super-close together, like making a highway with many more lanes in the same space, but without making the whole highway bigger!

So, what does this mean for you, a five-year-old?

  • Your mom's phone can be even thinner and lighter, so it fits in her pocket more easily! 📱
  • Your video games on your tablet can run even faster and smoother because the 'engine' is working super efficiently! 🎮
  • And maybe, just maybe, your next toy robot will be even smarter and tinier because its 'brain' can be packed more tightly! 🤖

It's like magic, but it's really clever engineering that helps make all our cool electronic toys and gadgets better!

Quick Summary
2 min read

The patent titled "Semiconductor Package and Fabricating Method Thereof" (US-9852976) introduces a groundbreaking approach to designing and manufacturing semiconductor devices, specifically focusing on advanced packaging solutions. The core innovation lies in its ability to create exceptionally thin, fine-pitch redistribution structures within semiconductor packages. These structures are critical for increasing the density of interconnections—the tiny pathways that carry electrical signals within a microchip—without expanding the overall physical size of the package.

The primary problem this invention solves is the limitation of conventional semiconductor packaging methods in accommodating the ever-growing demand for miniaturization and enhanced performance. As chips become more complex and require more input/output (I/O) connections, traditional redistribution layers become too thick or imprecise, hindering further device shrinkage and often leading to signal integrity issues. This patent provides a robust solution to overcome these physical and manufacturing constraints.

Technically, the approach detailed in this patent involves novel designs for semiconductor package structures that integrate these thin, high-density redistribution layers. The fabricating method described ensures precise control over the deposition and patterning of conductive traces and dielectric layers, allowing for ultra-fine line widths and spaces. This meticulous control results in superior electrical performance, reduced parasitic effects, and improved mechanical reliability, even in incredibly compact forms.

The business value and applications are profound. This technology enables the production of thinner, lighter, and more powerful electronic devices across various sectors, including mobile computing, wearable technology, artificial intelligence accelerators, and high-performance computing. It offers a significant competitive advantage to manufacturers by facilitating higher integration density, potentially reducing manufacturing costs through improved yields, and accelerating the development of next-generation products.

The market opportunity for this innovation is substantial, as it addresses a fundamental need in an industry constantly pushing the boundaries of miniaturization and performance. By providing a reliable method for advanced packaging, this patent positions itself as an enabler for future technological advancements, ensuring that electronic devices can continue to evolve in form factor and capability.

Plain English Explanation
4 min read

What Problem Does This Solve?

Imagine you're trying to build a super-fast, super-small computer, like the brain of a new smartphone or a tiny sensor for a smart home. Inside this computer's 'brain' (which is called a microchip or semiconductor device), there are millions of tiny electrical roads, or wires, that carry information. As we want these devices to get smaller and more powerful, we need to pack even more of these roads into a tiny space, making them incredibly thin and close together – what engineers call 'fine-pitch'.

The big problem is that with older ways of building these chips, making these roads so thin and close together becomes incredibly difficult. It's like trying to draw a million perfect, hair-thin lines without any of them touching or breaking. This leads to bigger, thicker chips than we want, or chips that don't work reliably, costing manufacturers a lot of money and slowing down innovation. Existing solutions often hit physical limits, making it hard to create devices that are both high-performing and sleek.

How Does It Work?

The patent "Semiconductor Package and Fabricating Method Thereof" offers a brilliant new recipe for building these tiny chips. Instead of just trying to make existing roads thinner, this innovation redesigns the entire 'package' or casing that holds the chip, and the way those internal roads are constructed. Think of it like this:

Instead of a single, slightly thick layer of roads, this new approach uses multiple, super-thin layers, stacked perfectly on top of each other. Each layer has incredibly precise, hair-thin conductive paths (the 'fine-pitch redistribution structures'). The method describes how to deposit special materials and carve out these tiny roads with extreme accuracy, layer by layer, almost like 3D printing, but on a microscopic scale. This meticulous process ensures that even though the roads are incredibly close, they don't interfere with each other, and the entire stack remains very thin.

It's like having a multi-story highway system inside your chip. Each story is ultra-flat and perfectly engineered, allowing for a massive amount of traffic (electrical signals) to flow efficiently without congestion, all within a compact skyscraper. This conceptual shift allows for greater connectivity and functionality to be integrated into a much smaller volume than previously possible, without sacrificing performance.

Why Does This Matter?

This technology matters because it directly enables the next generation of electronic devices that consumers and businesses demand. For consumers, it means: thinner, lighter smartphones and laptops; more comfortable and feature-rich wearables; and faster, more responsive smart home devices. For businesses, it translates into:

  • Competitive Advantage: Companies leveraging this patent can create products that are superior in size, performance, and power efficiency, outperforming competitors.
  • New Product Categories: The ability to miniaturize components opens doors for entirely new types of devices and applications, particularly in areas like advanced medical implants, sophisticated IoT sensors, and truly autonomous drones.
  • Market Leadership: Being able to produce such advanced components reliably and potentially more cost-effectively positions manufacturers as leaders in the high-growth segments of the semiconductor market.
  • Enhanced ROI: Improved manufacturing yields and the ability to command premium prices for advanced components contribute to better profit margins and a stronger return on investment for R&D.

What's Next?

The "Semiconductor Package and Fabricating Method Thereof" is a foundational technology. Looking ahead, we can expect to see its principles integrated into a wide array of high-performance and ultra-compact devices. It will be crucial for the advancement of Artificial Intelligence (AI) hardware, enabling more powerful AI processing in smaller form factors. It will also drive innovation in the Internet of Things (IoT), allowing for tiny, energy-efficient sensors and communication modules. As industries continue to demand more integrated and miniaturized electronics, the adoption of this approach will become increasingly widespread, shaping product roadmaps for the next decade and beyond. This patent isn't just an incremental step; it's a strategic leap forward.

Technical Abstract

A semiconductor device structure and a method for making a semiconductor device. As non-limiting examples, various aspects of this disclosure provide various semiconductor package structures, and methods for making thereof, that comprise a thin fine-pitch redistribution structure.

Technical Analysis
4 min read

The patent "Semiconductor Package and Fabricating Method Thereof" (US-9852976) details a sophisticated solution for advanced semiconductor packaging, specifically addressing the critical need for thin, fine-pitch redistribution structures. This technical analysis delves into the architectural and methodological innovations presented by this patent.

Technical Architecture of the Semiconductor Package At its core, this patent describes a semiconductor package structure designed to integrate a semiconductor die with high-density, fine-pitch redistribution layers (RDLs). The architecture typically comprises:

  1. Semiconductor Die: The central component, usually a silicon chip, with an array of I/O pads.
  2. Encapsulant/Molding Compound: A protective layer surrounding the die, often a polymer, providing mechanical support and environmental protection.
  3. Redistribution Layers (RDLs): These are the key innovation. The patent describes multiple conductive layers (e.g., copper, aluminum) separated by dielectric layers (e.g., polyimide, BCB). These RDLs fan out the fine-pitch I/O pads of the die to a larger pitch, enabling connection to the package substrate or external connections. The critical aspect here is the 'thin fine-pitch' nature, implying line widths and spaces often in the single-digit micrometer range.
  4. Vias: Vertical interconnects (e.g., copper-filled) passing through the dielectric layers to connect different RDLs or the RDLs to the die pads and external bumps/balls.
  5. Underfill Material: A resin applied between the die and the substrate (if applicable) to enhance mechanical coupling and reliability.

The structural innovation allows for a high density of interconnections within a minimal vertical stack height, directly contributing to overall package thinness and improved electrical performance by reducing parasitic effects associated with longer or less precise routing.

Implementation Details and Fabrication Method The fabricating method thereof is crucial to achieving the described architecture. It outlines a series of precise processing steps, often performed at the wafer level (Wafer-Level Packaging – WLP) or fan-out wafer-level packaging (FOWLP) to maximize efficiency and precision:

  1. Wafer Preparation: This involves cleaning and potentially applying a passivation layer to the semiconductor wafer (which may contain multiple dies).
  2. Dielectric Layer Deposition: A thin layer of dielectric material (e.g., photosensitive polyimide, PBO, or epoxy) is uniformly deposited over the die(s) and any underlying structures. This layer provides electrical insulation and mechanical support.
  3. Via Formation: Through photolithography and etching, openings (vias) are created in the dielectric layer to expose the underlying contact pads of the die or lower RDLs. The precision of this step is paramount for fine-pitch capabilities.
  4. Conductive Layer Seed Deposition: A thin seed layer (e.g., Ti/Cu) is deposited, typically by sputtering, to facilitate subsequent electroplating.
  5. Patterning of Conductive Traces (RDLs): A photoresist layer is applied and patterned to define the fine-pitch conductive lines and pads. This involves advanced lithography techniques, potentially employing stepper or scanner systems capable of sub-10 µm resolution.
  6. Electroplating: Copper or other conductive metal is electroplated onto the exposed seed layer within the photoresist pattern, forming the RDL traces and filling the vias.
  7. Photoresist Stripping & Seed Layer Etching: The photoresist is removed, and the exposed seed layer is selectively etched away, leaving only the electroplated conductive traces.
  8. Repeat: Steps 2-7 are repeated for each subsequent RDL layer, building up the multi-layer redistribution structure. Planarization techniques (e.g., chemical mechanical planarization - CMP) may be incorporated between layers to maintain a flat surface for subsequent processing.
  9. Final Passivation/Solder Mask: A top passivation layer is applied, and openings are created for solder bumps or balls for external connections.

Algorithm Specifics (Implicit) While no explicit algorithms are detailed, the method implies highly precise computational models for:

  • Lithography Pattern Design: Algorithms for optimizing mask designs to achieve ultra-fine lines and spaces while compensating for process variations (e.g., proximity effects, optical distortions).
  • Stress Simulation: Computational models to predict and mitigate stress accumulation and warpage in multi-layered thin film stacks, informing material selection and process parameters.
  • Electrical Simulation: Sophisticated electromagnetic simulators to model signal integrity, impedance matching, and parasitic effects of fine-pitch RDLs, guiding trace routing and dielectric thickness.

Integration Patterns and Performance Characteristics This technology is highly compatible with advanced packaging integration patterns such as 2.5D and 3D ICs, where interposers or through-silicon vias (TSVs) require extremely fine-pitch connectivity. The performance characteristics enabled are superior:

  • Reduced Package Thickness: Direct result of thin RDLs.
  • Higher I/O Density: Crucial for complex SoCs and chiplets.
  • Improved Signal Integrity: Shorter, more precise traces reduce signal loss, crosstalk, and delay.
  • Enhanced Thermal Management: Thinner dielectric layers can sometimes aid in heat dissipation, though specific materials would be critical.
  • Increased Reliability: Optimized material interfaces and stress management lead to better long-term performance under thermal and mechanical stress.

This patent provides a critical technical foundation for the next generation of high-performance, compact electronic devices, offering a pathway to overcome the physical limitations of current semiconductor packaging.

Business Impact
3 min read

The patent "Semiconductor Package and Fabricating Method Thereof" (US-9852976) represents a significant advancement in semiconductor packaging, with profound implications for various industries and substantial market opportunities. This innovation addresses a core bottleneck in modern electronics manufacturing: the ability to create smaller, more powerful, and cost-effective microchips.

Market Opportunity Size: The global semiconductor packaging market is a multi-billion dollar industry, continuously growing due to the pervasive demand for electronics. Within this, advanced packaging, specifically solutions enabling miniaturization and high-density integration, is the fastest-growing segment. This patent directly targets this high-growth area, which is critical for sectors like mobile communication, IoT, AI/ML hardware, automotive electronics, and high-performance computing. The addressable market for this technology is therefore immense, encompassing virtually all manufacturers of advanced semiconductor devices. As devices demand finer pitches and thinner profiles, the market for solutions like this will only expand.

Competitive Advantages: This technology offers several compelling competitive advantages:

  1. Enabling Miniaturization: The ability to create ultra-thin, fine-pitch redistribution structures allows for significantly smaller form factors for end products. This is a critical differentiator in consumer electronics, wearables, and medical devices where space is at a premium.
  2. Performance Enhancement: Improved signal integrity, reduced parasitic effects, and shorter electrical pathways lead to faster, more energy-efficient chips. This directly translates to superior product performance, a key selling point in competitive markets.
  3. Cost Efficiency (Potential): By providing a reliable and robust method for fine-pitch RDLs, the patent can lead to higher manufacturing yields compared to current, often problematic, approaches. Higher yields reduce rework and scrap, ultimately lowering per-unit production costs.
  4. Future-Proofing for Advanced Architectures: This innovation is foundational for emerging technologies such as 2.5D/3D integration, chiplet designs, and advanced Fan-Out Wafer-Level Packaging (FOWLP). Companies adopting this technology will be better positioned to capitalize on these future trends.
  5. Intellectual Property Protection: Owning a patent for such a critical component provides a strong competitive moat, allowing patentees to license the technology or gain a first-mover advantage in product development.

Revenue Potential: Revenue can be generated through multiple avenues:

  • Direct Manufacturing: Companies that implement this fabricating method can produce superior semiconductor packages, commanding premium prices for their advanced components.
  • Licensing: The patent holder can license the technology to other semiconductor manufacturers, foundries, or Integrated Device Manufacturers (IDMs), generating recurring royalty revenue.
  • Product Differentiation: Companies that integrate this technology into their own products (e.g., smartphones, AI accelerators) can differentiate their offerings based on superior performance, size, and power efficiency, leading to higher market share and profitability.

Business Models: Potential business models include:

  • Foundry Services: Offering advanced packaging services based on this patented method to fabless semiconductor companies.
  • Component Sales: Manufacturing and selling semiconductor packages or modules that incorporate this technology.
  • IP Licensing: A pure IP model, licensing the patent to multiple industry players.
  • Integrated Product Development: Using the technology internally to build and sell end products.

Strategic Positioning: Companies leveraging this patent can strategically position themselves as leaders in advanced packaging, high-performance computing components, or miniaturized electronics. This technology allows for greater design flexibility, enabling new product categories and enhancing existing ones, thereby securing a strong foothold in the value chain.

ROI Projections: The ROI for investing in or licensing this technology can be substantial. Reduced manufacturing defects, increased yields, and the ability to command higher prices for superior products contribute to improved profit margins. Furthermore, the strategic advantage of enabling next-generation devices can lead to significant market share gains and long-term business growth. Early adopters could see a rapid return on investment through product differentiation and market leadership in key technology segments.

Patent Claims
20 claims

Legal claims defining the scope of protection. Each claim is shown in both the original legal language and a plain English translation.

Claim 1

Original Legal Text

1. A semiconductor device comprising: a first redistribution structure comprising: a first dielectric layer comprising a first dielectric material; a first conductive trace embedded in the first dielectric layer and comprising: a first trace top side that is partially covered by the first dielectric layer; a first trace bottom side that is exposed at a bottom side of the first dielectric layer; and a first trace lateral side that is covered by the first dielectric layer; a first conductive via embedded in the first dielectric layer and comprising: a first via top side that is exposed at a top side of the first dielectric layer; a first via bottom side that is directly coupled to the first trace top side; and a first via lateral side that is covered by the first dielectric layer; and a die interconnection structure, at least a portion of which is formed on top of the first conductive via, where the die interconnection structure extends above the first dielectric layer; a second redistribution structure on a bottom side of the first redistribution structure and comprising: a second dielectric layer comprising a second dielectric material; a second conductive trace; and a second conductive via that extends through the second dielectric layer and electrically couples the second conductive trace to the first conductive trace; a semiconductor die attached to a top side of the first redistribution structure, where the semiconductor die comprises a conductive bump that is attached to the die interconnection structure of the first redistribution structure; and a mold material covering at least a portion of the top side of the first redistribution structure and a respective lateral side of the semiconductor die.

Plain English Translation

This semiconductor device features a fine-pitch redistribution structure. A first redistribution layer has a dielectric material with embedded conductive traces and vias. The traces have a top side connected to vias, a bottom side exposed, and lateral sides covered by the dielectric. The vias have a top side exposed, a bottom side connected to the traces, and lateral sides covered. A die interconnection structure sits on top of the vias and extends above the dielectric layer. A second redistribution structure is below the first, with another dielectric layer, conductive traces, and conductive vias connecting the second trace to the first trace. A semiconductor die is attached to the first redistribution structure via conductive bumps on the die interconnection structure. Mold material covers the top of the first redistribution structure and the side of the die.

Claim 2

Original Legal Text

2. The semiconductor device of claim 1 , comprising an underfill that extends to at least a lateral edge of the first and second redistribution structures.

Plain English Translation

The semiconductor device described in claim 1 (A semiconductor device comprising: a first redistribution structure comprising: a first dielectric layer comprising a first dielectric material; a first conductive trace embedded in the first dielectric layer and comprising: a first trace top side that is partially covered by the first dielectric layer; a first trace bottom side that is exposed at a bottom side of the first dielectric layer; and a first trace lateral side that is covered by the first dielectric layer; a first conductive via embedded in the first dielectric layer and comprising: a first via top side that is exposed at a top side of the first dielectric layer; a first via bottom side that is directly coupled to the first trace top side; and a first via lateral side that is covered by the first dielectric layer; and a die interconnection structure, at least a portion of which is formed on top of the first conductive via, where the die interconnection structure extends above the first dielectric layer; a second redistribution structure on a bottom side of the first redistribution structure and comprising: a second dielectric layer comprising a second dielectric material; a second conductive trace; and a second conductive via that extends through the second dielectric layer and electrically couples the second conductive trace to the first conductive trace; a semiconductor die attached to a top side of the first redistribution structure, where the semiconductor die comprises a conductive bump that is attached to the die interconnection structure of the first redistribution structure; and a mold material covering at least a portion of the top side of the first redistribution structure and a respective lateral side of the semiconductor die) includes an underfill material that extends to at least the lateral edges of both the first and second redistribution structures.

Claim 3

Original Legal Text

3. The semiconductor device of claim 1 , wherein one of the first and second dielectric materials comprises an inorganic dielectric material, and another of the first and second dielectric materials comprises an organic dielectric material.

Plain English Translation

The semiconductor device described in claim 1 (A semiconductor device comprising: a first redistribution structure comprising: a first dielectric layer comprising a first dielectric material; a first conductive trace embedded in the first dielectric layer and comprising: a first trace top side that is partially covered by the first dielectric layer; a first trace bottom side that is exposed at a bottom side of the first dielectric layer; and a first trace lateral side that is covered by the first dielectric layer; a first conductive via embedded in the first dielectric layer and comprising: a first via top side that is exposed at a top side of the first dielectric layer; a first via bottom side that is directly coupled to the first trace top side; and a first via lateral side that is covered by the first dielectric layer; and a die interconnection structure, at least a portion of which is formed on top of the first conductive via, where the die interconnection structure extends above the first dielectric layer; a second redistribution structure on a bottom side of the first redistribution structure and comprising: a second dielectric layer comprising a second dielectric material; a second conductive trace; and a second conductive via that extends through the second dielectric layer and electrically couples the second conductive trace to the first conductive trace; a semiconductor die attached to a top side of the first redistribution structure, where the semiconductor die comprises a conductive bump that is attached to the die interconnection structure of the first redistribution structure; and a mold material covering at least a portion of the top side of the first redistribution structure and a respective lateral side of the semiconductor die) has different dielectric materials for the first and second redistribution structures. One is an inorganic dielectric, and the other is an organic dielectric.

Claim 4

Original Legal Text

4. The semiconductor device of claim 1 , wherein the second conductive trace and the second conductive via are portions of a same continuous layer of metal.

Plain English Translation

In the semiconductor device described in claim 1 (A semiconductor device comprising: a first redistribution structure comprising: a first dielectric layer comprising a first dielectric material; a first conductive trace embedded in the first dielectric layer and comprising: a first trace top side that is partially covered by the first dielectric layer; a first trace bottom side that is exposed at a bottom side of the first dielectric layer; and a first trace lateral side that is covered by the first dielectric layer; a first conductive via embedded in the first dielectric layer and comprising: a first via top side that is exposed at a top side of the first dielectric layer; a first via bottom side that is directly coupled to the first trace top side; and a first via lateral side that is covered by the first dielectric layer; and a die interconnection structure, at least a portion of which is formed on top of the first conductive via, where the die interconnection structure extends above the first dielectric layer; a second redistribution structure on a bottom side of the first redistribution structure and comprising: a second dielectric layer comprising a second dielectric material; a second conductive trace; and a second conductive via that extends through the second dielectric layer and electrically couples the second conductive trace to the first conductive trace; a semiconductor die attached to a top side of the first redistribution structure, where the semiconductor die comprises a conductive bump that is attached to the die interconnection structure of the first redistribution structure; and a mold material covering at least a portion of the top side of the first redistribution structure and a respective lateral side of the semiconductor die), the second conductive trace and second conductive via are part of the same continuous metal layer.

Claim 5

Original Legal Text

5. The semiconductor device of claim 1 , comprising a conductive pillar, wherein: a top side of the conductive pillar, a top side of the mold material, and a top side of the semiconductor die are coplanar; and a bottom side of the conductive pillar is vertically lower than at least a portion of the interconnection structure of the first redistribution structure.

Plain English Translation

This invention relates to semiconductor packaging, specifically addressing challenges in achieving coplanarity and electrical connectivity in advanced semiconductor devices. The device includes a semiconductor die with an interconnection structure, such as a redistribution layer (RDL), embedded in a mold material. A conductive pillar is formed on the interconnection structure, where the top surfaces of the conductive pillar, the mold material, and the semiconductor die are aligned in a single plane. The bottom of the conductive pillar extends below at least part of the interconnection structure, ensuring robust mechanical and electrical connections. This design facilitates precise alignment and reliable interconnections in stacked or multi-chip configurations, improving manufacturing yield and device performance. The conductive pillar may be formed using electroplating, deposition, or other semiconductor fabrication techniques, and the coplanar arrangement simplifies subsequent processing steps, such as bonding or stacking. The invention is particularly useful in high-density packaging applications where precise alignment and reliable electrical connections are critical.

Claim 6

Original Legal Text

6. The semiconductor device of claim 5 , wherein the top side of the conductive pillar, the top side of the mold material, and the top side of the semiconductor die are grinded surfaces.

Plain English Translation

The semiconductor device from claim 5 (The semiconductor device described in claim 1, comprising a conductive pillar, wherein: a top side of the conductive pillar, a top side of the mold material, and a top side of the semiconductor die are coplanar; and a bottom side of the conductive pillar is vertically lower than at least a portion of the interconnection structure of the first redistribution structure) has a specific surface finish. The top surfaces of the conductive pillar, mold material, and semiconductor die are coplanar because they have been grinded to the same level.

Claim 7

Original Legal Text

7. The semiconductor device of claim 1 , wherein the first conductive trace has no seed layer.

Plain English Translation

In the semiconductor device described in claim 1 (A semiconductor device comprising: a first redistribution structure comprising: a first dielectric layer comprising a first dielectric material; a first conductive trace embedded in the first dielectric layer and comprising: a first trace top side that is partially covered by the first dielectric layer; a first trace bottom side that is exposed at a bottom side of the first dielectric layer; and a first trace lateral side that is covered by the first dielectric layer; a first conductive via embedded in the first dielectric layer and comprising: a first via top side that is exposed at a top side of the first dielectric layer; a first via bottom side that is directly coupled to the first trace top side; and a first via lateral side that is covered by the first dielectric layer; and a die interconnection structure, at least a portion of which is formed on top of the first conductive via, where the die interconnection structure extends above the first dielectric layer; a second redistribution structure on a bottom side of the first redistribution structure and comprising: a second dielectric layer comprising a second dielectric material; a second conductive trace; and a second conductive via that extends through the second dielectric layer and electrically couples the second conductive trace to the first conductive trace; a semiconductor die attached to a top side of the first redistribution structure, where the semiconductor die comprises a conductive bump that is attached to the die interconnection structure of the first redistribution structure; and a mold material covering at least a portion of the top side of the first redistribution structure and a respective lateral side of the semiconductor die), the first conductive trace is manufactured without a seed layer.

Claim 8

Original Legal Text

8. The semiconductor device of claim 1 , wherein the first conductive trace and other conductive traces of the first redistribution structure have a sub-micron pitch.

Plain English Translation

In the semiconductor device described in claim 1 (A semiconductor device comprising: a first redistribution structure comprising: a first dielectric layer comprising a first dielectric material; a first conductive trace embedded in the first dielectric layer and comprising: a first trace top side that is partially covered by the first dielectric layer; a first trace bottom side that is exposed at a bottom side of the first dielectric layer; and a first trace lateral side that is covered by the first dielectric layer; a first conductive via embedded in the first dielectric layer and comprising: a first via top side that is exposed at a top side of the first dielectric layer; a first via bottom side that is directly coupled to the first trace top side; and a first via lateral side that is covered by the first dielectric layer; and a die interconnection structure, at least a portion of which is formed on top of the first conductive via, where the die interconnection structure extends above the first dielectric layer; a second redistribution structure on a bottom side of the first redistribution structure and comprising: a second dielectric layer comprising a second dielectric material; a second conductive trace; and a second conductive via that extends through the second dielectric layer and electrically couples the second conductive trace to the first conductive trace; a semiconductor die attached to a top side of the first redistribution structure, where the semiconductor die comprises a conductive bump that is attached to the die interconnection structure of the first redistribution structure; and a mold material covering at least a portion of the top side of the first redistribution structure and a respective lateral side of the semiconductor die), the conductive traces in the first redistribution layer are very closely spaced together, exhibiting a sub-micron pitch.

Claim 9

Original Legal Text

9. A semiconductor device comprising: an upper redistribution structure comprising: a first dielectric layer comprising a first dielectric material; and a first conductive trace; a lower redistribution structure comprising: a second dielectric layer comprising a second dielectric material; and a second conductive trace electrically coupled to the first conductive trace; a semiconductor die attached to an upper side of the upper redistribution structure, the semiconductor die having die top side, a die bottom side, and a die thickness between the die top side and the die bottom side; and an underfill that extends laterally to at least as far as a lateral edge of the upper redistribution structure, wherein a maximum height of the underfill is at least one fourth of the die thickness above the die bottom side.

Plain English Translation

This semiconductor device includes upper and lower redistribution structures, a semiconductor die, and underfill. The upper redistribution structure consists of a first dielectric layer and a first conductive trace. The lower redistribution structure consists of a second dielectric layer and a second conductive trace electrically connected to the first conductive trace. The semiconductor die is attached to the top of the upper redistribution structure and has a die top side, a die bottom side, and a certain thickness. The underfill extends laterally at least as far as the edge of the upper redistribution structure, with a maximum height at least one-fourth of the die thickness above the die bottom side.

Claim 10

Original Legal Text

10. The semiconductor device of claim 9 , wherein the maximum height of the underfill is at least as high as the die top side.

Plain English Translation

In the semiconductor device from claim 9 (A semiconductor device comprising: an upper redistribution structure comprising: a first dielectric layer comprising a first dielectric material; and a first conductive trace; a lower redistribution structure comprising: a second dielectric layer comprising a second dielectric material; and a second conductive trace electrically coupled to the first conductive trace; a semiconductor die attached to an upper side of the upper redistribution structure, the semiconductor die having die top side, a die bottom side, and a die thickness between the die top side and the die bottom side; and an underfill that extends laterally to at least as far as a lateral edge of the upper redistribution structure, wherein a maximum height of the underfill is at least one fourth of the die thickness above the die bottom side), the maximum height of the underfill reaches at least as high as the top side of the semiconductor die.

Claim 11

Original Legal Text

11. The semiconductor device of claim 9 , wherein a lateral side of the underfill is coplanar with a lateral side of the upper redistribution structure.

Plain English Translation

In the semiconductor device from claim 9 (A semiconductor device comprising: an upper redistribution structure comprising: a first dielectric layer comprising a first dielectric material; and a first conductive trace; a lower redistribution structure comprising: a second dielectric layer comprising a second dielectric material; and a second conductive trace electrically coupled to the first conductive trace; a semiconductor die attached to an upper side of the upper redistribution structure, the semiconductor die having die top side, a die bottom side, and a die thickness between the die top side and the die bottom side; and an underfill that extends laterally to at least as far as a lateral edge of the upper redistribution structure, wherein a maximum height of the underfill is at least one fourth of the die thickness above the die bottom side), the lateral side of the underfill is aligned (coplanar) with the lateral side of the upper redistribution structure.

Claim 12

Original Legal Text

12. The semiconductor device of claim 9 , wherein the underfill comprises a pre-applied underfill material.

Plain English Translation

In the semiconductor device from claim 9 (A semiconductor device comprising: an upper redistribution structure comprising: a first dielectric layer comprising a first dielectric material; and a first conductive trace; a lower redistribution structure comprising: a second dielectric layer comprising a second dielectric material; and a second conductive trace electrically coupled to the first conductive trace; a semiconductor die attached to an upper side of the upper redistribution structure, the semiconductor die having die top side, a die bottom side, and a die thickness between the die top side and the die bottom side; and an underfill that extends laterally to at least as far as a lateral edge of the upper redistribution structure, wherein a maximum height of the underfill is at least one fourth of the die thickness above the die bottom side), the underfill material is pre-applied before die attach.

Claim 13

Original Legal Text

13. The semiconductor device of claim 9 , comprising an encapsulating material covering at least a portion of the upper side of the upper redistribution structure, wherein the encapsulating material comprises a lateral side that is coplanar with a respective lateral side of the underfill and a respective lateral side of the upper redistribution structure.

Plain English Translation

The semiconductor device from claim 9 (A semiconductor device comprising: an upper redistribution structure comprising: a first dielectric layer comprising a first dielectric material; and a first conductive trace; a lower redistribution structure comprising: a second dielectric layer comprising a second dielectric material; and a second conductive trace electrically coupled to the first conductive trace; a semiconductor die attached to an upper side of the upper redistribution structure, the semiconductor die having die top side, a die bottom side, and a die thickness between the die top side and the die bottom side; and an underfill that extends laterally to at least as far as a lateral edge of the upper redistribution structure, wherein a maximum height of the underfill is at least one fourth of the die thickness above the die bottom side) includes an encapsulating material that covers part of the top of the upper redistribution structure. The side of the encapsulating material is aligned (coplanar) with the sides of the underfill and the upper redistribution structure.

Claim 14

Original Legal Text

14. The semiconductor device of claim 9 , wherein the underfill comprises a capillary underfill material.

Plain English Translation

In the semiconductor device from claim 9 (A semiconductor device comprising: an upper redistribution structure comprising: a first dielectric layer comprising a first dielectric material; and a first conductive trace; a lower redistribution structure comprising: a second dielectric layer comprising a second dielectric material; and a second conductive trace electrically coupled to the first conductive trace; a semiconductor die attached to an upper side of the upper redistribution structure, the semiconductor die having die top side, a die bottom side, and a die thickness between the die top side and the die bottom side; and an underfill that extends laterally to at least as far as a lateral edge of the upper redistribution structure, wherein a maximum height of the underfill is at least one fourth of the die thickness above the die bottom side), the underfill material is applied via capillary action.

Claim 15

Original Legal Text

15. The semiconductor device of claim 9 , comprising: a substrate; conductive interconnection structures connecting a bottom side of the semiconductor die to an upper side of the substrate; and an encapsulating material that covers at least a portion of the upper side of the substrate and laterally surrounds the semiconductor die, the upper and lower redistribution structures, and the conductive interconnection structures, while leaving an upper side of the semiconductor die uncovered by the encapsulating material.

Plain English Translation

This semiconductor device has a die connected to a substrate using redistribution structures and conductive interconnections. It contains an upper redistribution structure (first dielectric layer and trace) and a lower redistribution structure (second dielectric layer and trace) electrically connected to the first. Conductive interconnection structures connect the bottom of the die to the top of the substrate. An encapsulating material covers the top of the substrate and surrounds the die, redistribution structures, and interconnections, but the top of the die remains exposed. Underfill exists between the die and the upper redistribution structure.

Claim 16

Original Legal Text

16. The semiconductor device of claim 9 , wherein a portion of the first underfill material is between the semiconductor die and the upper redistribution structure.

Plain English Translation

In the semiconductor device from claim 9 (A semiconductor device comprising: an upper redistribution structure comprising: a first dielectric layer comprising a first dielectric material; and a first conductive trace; a lower redistribution structure comprising: a second dielectric layer comprising a second dielectric material; and a second conductive trace electrically coupled to the first conductive trace; a semiconductor die attached to an upper side of the upper redistribution structure, the semiconductor die having die top side, a die bottom side, and a die thickness between the die top side and the die bottom side; and an underfill that extends laterally to at least as far as a lateral edge of the upper redistribution structure, wherein a maximum height of the underfill is at least one fourth of the die thickness above the die bottom side), some of the underfill material is located between the semiconductor die and the upper redistribution structure.

Claim 17

Original Legal Text

17. A semiconductor device comprising: an upper redistribution structure comprising: a first dielectric layer comprising a first dielectric material; and a first conductive trace; a lower redistribution structure comprising: a second dielectric layer comprising a second dielectric material; and a second conductive trace electrically coupled to the first conductive trace; a first semiconductor die attached to an upper side of the upper redistribution structure; a first underfill between the first semiconductor die and the upper side of the upper redistribution structure and laterally surrounding at least a lower portion of the first semiconductor die; a second semiconductor die attached to the upper side of the upper redistribution structure; a first mold material covering at least a portion of the upper side of the upper redistribution structure and at least a portion of a lateral side of the first semiconductor die; and a second mold material, distinct from the first mold material, that laterally surrounds at least the second semiconductor die.

Plain English Translation

This semiconductor device features upper and lower redistribution structures, two semiconductor dies, and two different mold materials. The upper redistribution structure includes a first dielectric layer and a first conductive trace. The lower redistribution structure has a second dielectric layer and a second conductive trace connected to the first. A first semiconductor die is attached to the top of the upper redistribution structure, with a first underfill between them that also surrounds the bottom of the die. A second semiconductor die is also attached to the upper redistribution structure. A first mold material covers the top of the redistribution structure and part of the side of the first die. A second, distinct mold material surrounds at least the second die.

Claim 18

Original Legal Text

18. The semiconductor device of claim 17 , wherein the second mold material extends laterally outward in all lateral directions farther than the first mold material.

Plain English Translation

In the semiconductor device from claim 17 (A semiconductor device comprising: an upper redistribution structure comprising: a first dielectric layer comprising a first dielectric material; and a first conductive trace; a lower redistribution structure comprising: a second dielectric layer comprising a second dielectric material; and a second conductive trace electrically coupled to the first conductive trace; a first semiconductor die attached to an upper side of the upper redistribution structure; a first underfill between the first semiconductor die and the upper side of the upper redistribution structure and laterally surrounding at least a lower portion of the first semiconductor die; a second semiconductor die attached to the upper side of the upper redistribution structure; a first mold material covering at least a portion of the upper side of the upper redistribution structure and at least a portion of a lateral side of the first semiconductor die; and a second mold material, distinct from the first mold material, that laterally surrounds at least the second semiconductor die), the second mold material extends further outward in all directions than the first mold material.

Claim 19

Original Legal Text

19. The semiconductor device of claim 18 , wherein the second mold material laterally surrounds the first mold material.

Plain English Translation

In the semiconductor device from claim 17 (A semiconductor device comprising: an upper redistribution structure comprising: a first dielectric layer comprising a first dielectric material; and a first conductive trace; a lower redistribution structure comprising: a second dielectric layer comprising a second dielectric material; and a second conductive trace electrically coupled to the first conductive trace; a first semiconductor die attached to an upper side of the upper redistribution structure; a first underfill between the first semiconductor die and the upper side of the upper redistribution structure and laterally surrounding at least a lower portion of the first semiconductor die; a second semiconductor die attached to the upper side of the upper redistribution structure; a first mold material covering at least a portion of the upper side of the upper redistribution structure and at least a portion of a lateral side of the first semiconductor die; and a second mold material, distinct from the first mold material, that laterally surrounds at least the second semiconductor die) and claim 18 (the second mold material extends laterally outward in all lateral directions farther than the first mold material), the second mold material also laterally surrounds the first mold material.

Claim 20

Original Legal Text

20. The semiconductor device of claim 17 , wherein the second semiconductor die is attached to the upper side of the upper redistribution structure such that the second semiconductor die is electrically coupled to the first semiconductor die.

Plain English Translation

In the semiconductor device from claim 17 (A semiconductor device comprising: an upper redistribution structure comprising: a first dielectric layer comprising a first dielectric material; and a first conductive trace; a lower redistribution structure comprising: a second dielectric layer comprising a second dielectric material; and a second conductive trace electrically coupled to the first conductive trace; a first semiconductor die attached to an upper side of the upper redistribution structure; a first underfill between the first semiconductor die and the upper side of the upper redistribution structure and laterally surrounding at least a lower portion of the first semiconductor die; a second semiconductor die attached to the upper side of the upper redistribution structure; a first mold material covering at least a portion of the upper side of the upper redistribution structure and at least a portion of a lateral side of the first semiconductor die; and a second mold material, distinct from the first mold material, that laterally surrounds at least the second semiconductor die), the second semiconductor die is attached to the upper redistribution structure so that it is electrically connected to the first semiconductor die.

Video Content

60-Second Explainer Script

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Visual Concepts

Hero Image: Core Concept of Semiconductor Package and Fabricating Method Thereof

Hero image showing a detailed cross-section of an advanced semiconductor package, illustrating the thin, fine-pitch redistribution layers (RDLs) enabled by the Semiconductor Package and Fabricating Method Thereof patent.

View generation prompt
A modern technical illustration showing a cross-section of an advanced semiconductor package. Highlight a semiconductor die at the center, surrounded by multiple layers of ultra-thin, fine-pitch redistribution structures (RDLs) with clearly defined conductive traces and dielectric layers. Show these layers fanning out from the die to external connections. Use a clean, futuristic blue and white color scheme, emphasizing precision and miniaturization. Text overlay: 'Semiconductor Package and Fabricating Method Thereof: Ultra-Thin, Fine-Pitch Interconnects'.

Technical Diagram: Fabrication Process Flow for Semiconductor Package and Fabricating Method Thereof

Technical flowchart illustrating the multi-step fabrication process for creating fine-pitch redistribution structures as described in the Semiconductor Package and Fabricating Method Thereof patent.

View generation prompt
A professional, step-by-step technical flowchart illustrating the key stages of the fabricating method described in the Semiconductor Package and Fabricating Method Thereof patent. Start with 'Wafer Preparation,' move through 'Dielectric Layer Deposition,' 'Conductive Layer Patterning (Fine-Pitch),' 'Via Formation,' 'Planarization,' and 'Final Package Assembly.' Use standard flowchart symbols and clear labels. Emphasize the iterative nature of RDL creation. Style: Clean lines, muted technical colors (grays, blues, subtle greens).

Concept Illustration: Miniaturization and Efficiency from Semiconductor Package and Fabricating Method Thereof

Abstract illustration symbolizing the enhanced miniaturization, efficiency, and high-density connectivity achieved by the Semiconductor Package and Fabricating Method Thereof.

View generation prompt
An abstract, creative illustration visualizing the core benefits of the Semiconductor Package and Fabricating Method Thereof. Show a glowing, intricate network of fine lines and connections converging efficiently within a compact, transparent cube or sphere, representing a modern semiconductor package. Surround it with subtle energy flows and data streams, implying speed and power. Use modern abstract styles with smooth gradients (e.g., blue-to-purple, green-to-cyan) and soft lighting to convey innovation and advanced technology.

Comparison Chart: Semiconductor Package and Fabricating Method Thereof vs. Prior Art

Infographic comparing prior art semiconductor packaging with the advanced, thin, fine-pitch structures enabled by the Semiconductor Package and Fabricating Method Thereof, highlighting benefits in thickness, pitch, and performance.

View generation prompt
An infographic-style comparison chart with two distinct columns: 'Prior Art Packaging' on the left and 'Semiconductor Package and Fabricating Method Thereof' on the right. For 'Prior Art,' show thicker RDL layers, wider line/space, and potentially larger package dimensions. For 'Semiconductor Package and Fabricating Method Thereof,' depict significantly thinner RDLs, ultra-fine-pitch lines, and a more compact overall package. Include key metrics like 'Package Thickness,' 'RDL Pitch,' 'Performance,' and 'Yield' with illustrative icons and clear advantages for the innovation. Suggested style: Clean infographic with contrasting colors (e.g., red for prior art, green for innovation) and simple icons.

Social Media Card: Key Benefits of Semiconductor Package and Fabricating Method Thereof

Social media card announcing the Semiconductor Package and Fabricating Method Thereof patent, highlighting its benefits for microchip technology and miniaturization.

View generation prompt
An eye-catching social media card design. Dominant bold typography stating 'Revolutionizing Microchips!' or 'Thinner, Faster, Smarter.' Below that, list 2-3 key benefits concisely, e.g., 'Ultra-Fine-Pitch RDLs,' 'Enhanced Device Performance,' 'Miniaturization Enabled.' Feature a stylized, abstract graphic representing a modern chip or interconnects. Include the patent title 'Semiconductor Package and Fabricating Method Thereof' clearly. Use vibrant, contrasting colors (e.g., deep blue background with bright yellow or white text) to grab attention. Add a small logo placeholder for 'Patentable.app'.
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Patent Metadata

Filing Date

January 6, 2017

Publication Date

December 26, 2017

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Semiconductor Package & Fabricating Method Thereof - US-9852976